The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Jun. 16, 2003
Antonio Luis Pacheco Rotondaro, Dallas, TX (US);
Trace Quentin Hurd, Plano, TX (US);
Stephanie Watts Butler, Richardson, TX (US);
Majid M. Mansoori, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Methods are presented for fabricating MOS transistors, in which a sacrificial material such as silicon germanium is formed over a gate contact material prior to gate patterning. The sacrificial material is then removed following sidewall spacer formation to provide a recess at the top of the gate structure. The recess provides space for optional epitaxial silicon formation and suicide formation over the gate contact material without overflowing the tops of the sidewall spacers to minimize shorting between the gate and the source/drains in the finished transistor.