The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
Aug. 03, 2001
Applicant:
Inventors:
Yoshio Harada, Hyogo, JP;
Junichi Takeuchi, Hyogo, JP;
Tatsuya Hamaguchi, Kanagawa, JP;
Nobuyuki Nagayama, Yamanashi, JP;
Kouji Mitsuhashi, Yamanashi, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; B32B 3/10 ;
U.S. Cl.
CPC ...
H01L 2/100 ; B32B 3/10 ;
Abstract
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al O film formed on the undercoat as a middle layer and Y O sprayed coating formed on the middle layer as a top coat.