The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
Aug. 09, 2002
Mary Kristin Nicholes, Eden Prairie, MN (US);
Stephen John Carlson, Shorewood, MN (US);
Mark R. Litchy, Plymouth, MN (US);
The BOC Group, Inc., Murray Hill, NJ (US);
Abstract
An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described. The apparatus comprises (i) a plurality of sample delivery lines, each line carrying a chemical-mechanical polishing slurry, (ii) a manifold in fluid communication with the plurality of sample delivery lines, (iii) means for opening and closing the fluid communication between each sample delivery line and the manifold, (iv) an aspirator in fluid communication with the manifold, (vi) means opening and closing the fluid communication between the aspirator and the manifold, (vii) a pressure between the aspirator and the sample delivery lines, a reduction in the pressure resulting in the draw of a sample from the sample delivery line into the manifold when the fluid communication between the line and the manifold is open, (viii) a sensor for measuring the at least one property of the slurry, the sensor in fluid communication with the manifold, and (ix) means for opening and closing the fluid communication between the manifold and the sensor.