The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
Sep. 13, 2001
Applicant:
Inventors:
James DeYoung, Durham, NC (US);
James B. McClain, Raleigh, NC (US);
Michael E. Cole, Raleigh, NC (US);
Steven Lee Worm, Raleigh, NC (US);
David Brainard, Wake Forest, NC (US);
Assignee:
Micell Technologies, Inc., Raleigh, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/00 ;
U.S. Cl.
CPC ...
B08B 3/00 ;
Abstract
An apparatus for cleaning a microelectronic substrate includes a pressure chamber, a supply of a process liquid including dense phase CO fluidly connected to the chamber and a distilling system. Distilling system includes a still fluidly connected to the chamber and operative to separate CO from the process fluid. The distilling system is operative to re-introduce the separated CO into the chamber or a further chamber.