The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 24, 2004

Filed:

Jun. 14, 1999
Applicant:
Inventor:

Josephus J. M. Braat, Eindhoven, NL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 2/740 ;
U.S. Cl.
CPC ...
G02B 2/740 ;
Abstract

An optical scanning device scans a surface ( ) provided with marks with a focused radiation beam ( ) along a scan line. The device has a radiation-sensitive detection system ( ) comprises a plurality of detectors. An electronic circuit ( ) determines the time differences between corresponding parts of the detector signals relating to passage of the radiation beam over one of the marks. The time differences are used to form a signal representing a primary wavefront aberration of the radiation beam.


Find Patent Forward Citations

Loading…