The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2004
Filed:
Sep. 11, 2002
Yunlong Sun, Beaverton, OR (US);
Richard S. Harris, Portland, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
A quasi-CW diode-pumped, A-O Q-switched solid-state harmonic laser system ( ) synchronizes timing of the quasi-CW pumping with movement of the positioning system ( ) to reduce pumping while the positioning system ( ) is moving from one target area ( ) to the next target area ( ) to form multiple vias in a substrate at a high throughput. Thus, the available UV power for via formation is higher even though the loading to the laser pumping diodes ( ) remains the same as that currently available through conventional CW pumping with conventionally available laser pumping diodes ( ). The quasi-CW-pumping current profile can be further modified to realize a preferred UV pulse amplitude profile.