The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 24, 2004

Filed:

Jul. 29, 2002
Applicant:
Inventors:

Daniel W. Steele, Clay, NY (US);

Joseph L. Chovan, North Syracuse, NY (US);

Assignee:

Lockheed Martin Corporation, Bethesda, MD (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ; H01L 2/302 ;
U.S. Cl.
CPC ...
H01L 2/144 ; H01L 2/302 ;
Abstract

Micro electromechanical, MEM, components are created which include at least one integrated circuit die ( ). A cavity in the MEM component modules ( ) further allows for the flush mounted attachment of component modules when the component modules are stacked to create MEM system structures. Commonly positioned via holes within the component modules provide for communication among the dies ( ) on the stacked modules. In one embodiment of the invention, module layers are stacked in an alternating manner that further creates, within in the structure horizontal interlocking slots and vertical chambers. The interlocking slots can be used to join a plurality of structures together and the vertical chambers can be used to draw heat from the structure ( ).


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