The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2004

Filed:

Nov. 26, 2002
Applicant:
Inventors:

Gregory J. Dunn, Arlington Heights, IL (US);

Allyson Beuhler, Downers Grove, IL (US);

David Penunuri, Fountain Hills, AZ (US);

Assignee:

Motorola, Inc., Schaumburg, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/980 ; H01L 3/1112 ; H01L 3/10288 ;
U.S. Cl.
CPC ...
H01L 2/980 ; H01L 3/1112 ; H01L 3/10288 ;
Abstract

An exemplary system and method for providing an acoustic plate wave apparatus is disclosed as comprising inter alia: a monocrystalline silicon substrate ( ); an amorphous oxide material ( ); a monocrystalline perovskite oxide material ( ); a monocrystalline piezoelectric material ( ); and a flexural plate wave component ( ) having an input interdigitated transducer ( ), an output interdigitated transducer ( ) and an optional support layer ( ). Deposition or removal of material on or from an absorptive thin film sensor surface ( ), or changes in the mechanical properties of the thin film ( ) in contact with various chemical species, or changes in the electrical characteristics of a solvent solution exposed to the thin film ( ) generally operate to produce measurable perturbations in the vector quantities (e.g., velocity, etc.) and scalar quantities (e.g., attenuation, etc.) of the acoustic plate modes.


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