The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2004

Filed:

Feb. 21, 2002
Applicant:
Inventors:

Eiji Shamoto, Kobe-shi, Hyogo, JP;

Norikazu Suzuki, Suita-shi, Osaka, JP;

Toshimichi Moriwaki, Kobe-shi, Hyogo, JP;

Makoto Matsuo, Kyoto-shi, Kyoto, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23B 1/00 ; B23D 7/900 ; H01L 4/108 ;
U.S. Cl.
CPC ...
B23B 1/00 ; B23D 7/900 ; H01L 4/108 ;
Abstract

An elliptical vibratory cutting apparatus includes a control mechanism which applies a sinusoidal voltage having a predetermined phase difference to piezoelectric elements. Flexure vibrations are accordingly generated in X and Y directions. The vibrations in the X direction cause interference with the vibrations in the Y direction and vice versa. An amount of interference, caused by vibrations in one direction, with vibrations in another direction, is correctively eliminated by the control mechanism (interference eliminating unit. A workpiece is thus cut by means of a cutting tool through elliptical vibrations with high precision.


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