The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2004
Filed:
Nov. 13, 2002
David M. Inori, Napa, CA (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
An apparatus for cleaning a reaction chamber which has a chamber, a blade apparatus and a reciprocable rotating unit. The chamber has a wall with an interior surface. The blade apparatus has at least one annular mounting member and at least three scraping blades attached peripherally about the annular mounting member and arranged in a parallel relationship to a longitudinal axis of the chamber. The reciprocable movement unit has a reciprocable member pivotally connected at a peripheral position to the blade apparatus. The reciprocable movement unit rotates the scraping blade(s) circumferentially back and forth along the interior surface of the chamber to scrape its interior surface.