The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Oct. 25, 2002
Applicant:
Inventors:
Suk-Il Yoon, Kyungki-do, KR;
Young-Woong Park, Suwon, KR;
Chang-Il Oh, Seongnam, KR;
Sang-Dai Lee, Kyungki-do, KR;
Chong-Soon Yoo, Kyungki-do, KR;
Assignee:
Dongjin Semichem Co., Ltd., Incheon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/112 ; G03C 5/00 ; C11D 7/50 ; C11D 7/32 ;
U.S. Cl.
CPC ...
G03C 1/112 ; G03C 5/00 ; C11D 7/50 ; C11D 7/32 ;
Abstract
The present invention relates to a resist stripper composition that is used to remove resists during semiconductor device manufacturing processes such as for large size integrated circuits, very large size integrated circuits, etc. The resist stripper composition comprises 3 to 10 wt % of an organic amine compound, 30 to 60 wt % of a solvent selected from a group consisting of DCMAc, DMF, DMI, NMP, etc., 30 to 60 wt % of water, 1 to 10 wt % of catechol, resorcin or a mixture thereof and 1 to 10 wt % of a C4-6 straight polyhydric alcohol.