The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Mar. 27, 2002
Applicant:
Inventors:
Christopher A. Johnson, Albuquerque, NM (US);
James W. Ridout, Albuquerque, NM (US);
George M. Wityak, Albuquerque, NM (US);
Assignee:
Academy Corporation, Albuquerque, NM (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/146 ;
U.S. Cl.
CPC ...
H01L 2/146 ;
Abstract
A target-backing plate assembly for use in physical vapor deposition (PVD) processes. The lower curved surface of the target of the assembly is received in a conformingly-shaped backing plate, while a planar upper surface is presented for PVD. The shape of the target increases the amount of material dissipated and the quality of the film and reduces the amount of necessary machining in production.