The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Jan. 19, 2001
Dean L. Doty, Plano, TX (US);
Yan Xu, Houston, TX (US);
Stephen Chesters, Allen, TX (US);
Ben R. Hall, Mesquite, TX (US);
Roger Q. Petton, Dallas, TX (US);
Thomas P. Ross, Mesquite, TX (US);
Charles A. White, Red Oak, TX (US);
Reginald Wynne, Blue Island, IL (US);
Air Liquide America, L.P., Houston, TX (US);
Abstract
Provided are apparatuses and methods for mixing gases. The apparatuses are suitable for use in the manufacture of an electronic device. The apparatuses include a gas mixing manifold. A first, bulk gas source is connected to introduce a flow of a first gas to the manifold. A second gas source is connected to introduce a flow of a second gas to the manifold. The first and second gases are mixed in the manifold, thereby forming a gas mixture. A conduit is connected to one or more point of use for introducing a flow of the gas mixture thereto. The present invention is particularly applicable in the semiconductor manufacturing industry.