The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6771354 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 03, 2004

Filed:

Nov. 07, 2002
Applicant:
Inventor:

Hiroaki Kato, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ;
Abstract

An anti-vibration apparatus includes a table, an actuator system which applies a force to the table, a first system which applies to the actuator system a first signal for causing the actuator system to apply the force in proportion to a displacement of the table, and a second system which applies to the actuator system a second signal for causing the actuator system to apply the force based on an acceleration of the table. The first and second signals are generated by the first and second systems, respectively, so that a natural vibration mode of a system including the table and the actuator system is unchanged.


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Kato, Hiroaki. (2004). Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory (U.S. Patent No. 6771354). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6771354

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