The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Jan. 03, 2002
Applicant:
Inventors:
Assignee:
Laser Imaging Systems GmbH & Co. KG, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/14 ;
U.S. Cl.
CPC ...
H01J 3/14 ;
Abstract
Apparatus for scanning a beam across a surface including a scanner scanning a pulsed laser beam across a surface and a position indicator receiving an input from the pulsed laser beam at a plurality of locations across the surface, and outputting position indications indicating a position of said pulsed laser beam along said surface. The position indications are used to modulate data in apparatus for exposing patterns on surfaces, for example electrical circuit patterns on photosensitized surfaces. One use of such apparatus is the manufacture of electrical circuits.