The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Sep. 18, 2001
Applicant:
Inventors:
Holger J. Koenigsmann, Congers, NY (US);
Paul S. Gilman, Suffern, NY (US);
Assignee:
Praxair S.T. Technology, Inc., North Haven, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C22C 2/702 ;
U.S. Cl.
CPC ...
C22C 2/702 ;
Abstract
The sputter target includes a tantalum body having tantalum grains formed from consolidating tantalum powder and a sputter face. The sputter face has an atom transport direction for transporting tantalum atoms away from the sputter face for coating a substrate. The tantalum grains have at least a 40 percent ( ) direction orientation ratio and less than a 15 percent ( ) direction orientation ratio in an atom transport direction away from the sputter face for increasing sputtering uniformity.