The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6769463 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 03, 2004

Filed:

May. 16, 2002
Applicant:
Inventor:

Kim Ngoc Vu, Yorba Linda, CA (US);

Assignee:

Celerity Group, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/00 ;
U.S. Cl.
CPC ...
G05D 7/00 ;
Abstract

The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick adapted to be mounted to a mounting surface. The fluid stick includes a first flow component positioned in the fluid stick and a second flow component positioned in the fluid stick between the first flow component and the mounting surface and in fluid connection with the first flow component.


Find Patent Forward Citations

Vu, Kim. (2004). Fluid flow system (U.S. Patent No. 6769463). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6769463

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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