The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2004
Filed:
Nov. 26, 2002
Akihiko Souda, Kanagawa-ken, JP;
Komatsu Limited, Tokyo, JP;
Abstract
Illumination light of an illumination device irradiates a part of a peripheral surface of a semiconductor wafer from a side of the semiconductor wafer. Then, a shape of a side surface of a rim of the wafer that is an area to be processed is picked up by a image-pickup device disposed in an irradiation direction so as to be opposed to the illumination device interposing the wafer. A difference of the shape of a contour of the wafer rim can be recognized visually/automatically, promptly and accurately, and a minute and local planar area to be processed on the wafer rim can be determined accurately.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile