The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2004
Filed:
Oct. 30, 2002
Christine Hau-Riege, Fremont, CA (US);
Stefan Hau-Riege, Fremont, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
For locating an extrusion from an interconnect, an extrusion monitor structure is formed to surround the interconnect and is separated from the interconnect by a dielectric material. A first via is coupled to the interconnect, and a second via is coupled to the extrusion monitor structure and separated from the first via by a via distance (L ). The extrusion is located at an extrusion site distance (L ) from the first via and between the first and second vias to short-circuit the interconnect to the extrusion monitor structure. A resistance (R ) between the first and second vias is measured, and the L is determined from a relationship with R , L , and resistivities and dimensions of the interconnect and the extrusion monitor structure.