The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2004
Filed:
Apr. 14, 2003
Applicant:
Inventors:
Assignee:
Nanya Technology Corporation, Taoyuan, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ;
U.S. Cl.
CPC ...
H01L 2/18242 ;
Abstract
Method for forming bottle trenches by liquid phase oxide deposition. The method includes the steps of providing a substrate having a pad layer formed thereon, and a trench formed in a predetermined position; forming a masking layer at the bottom part of the trench; using liquid phase deposition (LPD) to form an LPD oxide layer on the sidewalls of the trench; removing the masking layer to expose the bottom part of the trench; subjecting the LPD oxide layer to annealing; and etching the bottom part of the trench not covered by the LPD oxide layer to form a bottle trench.