The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2004
Filed:
Nov. 07, 2002
Applicant:
Inventor:
Marsbed Hablanian, Wellesley, MA (US);
Assignee:
Varian, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 9/00 ; F04B 1/924 ; F04B 2/308 ; F04B 5/22 ;
U.S. Cl.
CPC ...
F04B 9/00 ; F04B 1/924 ; F04B 2/308 ; F04B 5/22 ;
Abstract
A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.