The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
May. 31, 2002
Applicant:
Inventors:
Edward C. Stewart, Buda, TX (US);
Susan Hickey, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 5/28 ;
U.S. Cl.
CPC ...
G01B 5/28 ;
Abstract
A method includes identifying a degraded condition associated with the processing of a workpiece. At least one process tool associated with the degraded condition is identified. Trace data collection is enabled for the identified process tool. A system includes a processing system configured to process a workpiece and a tool monitor. The tool monitor is configured to identify a degraded condition associated with the processing of the workpiece, identify at least one process tool from the processing system associated with the degraded condition, and enable trace data collection for the identified process tool.