The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
Jun. 21, 2002
Applicant:
Inventors:
Charles D. Carr, Orefield, PA (US);
Zhencan Fan, Andover, MA (US);
Lu Fang, Lehigh, PA (US);
Michael Hahn, Allentown, PA (US);
Xiaoqing Yin, Allentown, PA (US);
Assignee:
Agere Systems Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract
The present invention provides a method of testing micro-electrical mechanical mirrors including simultaneously applying a voltage to each of a plurality of such mirrors to tilt each of the plurality to a deflection angle, and simultaneously deflecting a beam from each of the plurality using an interferometer to simultaneously determine an accuracy of the deflection angle of each of the plurality. In addition, a method of manufacturing micro-electrical mechanical mirrors is also disclosed.