The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
Nov. 06, 2003
Anthony G. Liepert, Lincoln, MA (US);
Jeffrey C. Warren, Westford, MA (US);
Robert M. Curry, Jr., Arlington, MA (US);
Varian, Inc., Palo Alto, CA (US);
Abstract
Vacuum pumping apparatus includes a scroll set having an inlet and an outlet. The scroll set includes a first stationary scroll blade and a second stationary scroll blade extending from a stationary plate and separated by a gap, and an orbiting scroll extending from an orbiting plate, wherein the first and second stationary scroll blades are intermeshed with the orbiting scroll blade to define one or more interblade pockets. The vacuum pumping apparatus further includes a relief port in the gap between the first and second stationary scroll blades and coupled through a relief passage to an exhaust, a relief valve in the relief passage, and a drive mechanism operatively coupled to the orbiting scroll element for producing orbiting motion of the orbiting scroll blade relative to the first and second stationary scroll blades.