The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
May. 20, 2002
Applicant:
Inventors:
Joseph A. Miragliotta, Ellicott City, MD (US);
Kenneth R. Grossman, Olney, MD (US);
R. Kelly Frazer, Highland, MD (US);
Robert J. Bamberger, Jr., Baltimore, MD (US);
Assignee:
The Johns Hopkins University, Baltimore, MD (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/24 ;
U.S. Cl.
CPC ...
G01L 1/24 ;
Abstract
A non-contact method for evaluating stress in a substrate. An impurity is non-uniformly introduced into at least one region of a crystalline substrate. The crystalline substrate is subjected to physical stress. Fluorescence producing energy is directed at the crystalline substrate. A fluorescence produced by the crystalline substrate is measured. The fluorescence is correlated with the stress on the crystalline substrate.