The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
Oct. 17, 2002
Applicant:
Inventors:
Felix Mayer, Zürich, CH;
Andreas Martin Haeberli, Wetzikon, CH;
Assignee:
Sensirion AG, Zurich, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/68 ;
U.S. Cl.
CPC ...
G01F 1/68 ;
Abstract
To measure the flow in a liquid, the liquid ( ) is led in a duct ( ) along a flow sensor ( ). The flow sensor ( ) is integrated together with a processing and control circuit on a semiconductor substrate. It comprises a heating and, symmetrically thereto, two temperature sensors. The flow is determined from the temperature difference between the temperature sensors and/or from the power dissipation of the heating. For calibrating the sensor, a valve ( ) is provided by means of which the duct ( ) can be interrupted. This arrangement allows a flow measurement of high accuracy.