The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
Sep. 07, 2000
David F. Skoll, Ottawa, CA;
Chipworks, Ottawa, CA;
Abstract
A mesh is created from selected focus points having locations on a surface of interest of a sample being micro-imaged. The mesh and associated focus settings of the focus points are used to define adjacent focus facets forming a focus surface substantially coincident with the surface of interest of the sample. In micro-imaging the sample, a micro-imaged portion of the surface of interest is segmented for the purpose of acquiring tile images. A tile image focus location is used to extract a tile image focus setting from the focus surface. A tile image focus determination process selects a focus facet coincident with the tile image focus location and interpolates a tile image focus setting from focus settings associated with the focus points defining the focus facet. If a coincident focus facet is not found, the tile image focus setting is set to the focus setting of a nearest focus point. Dependence on autofocus is thus eliminated, providing faster imaging and better focused images.