The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
Jan. 27, 2003
Applicant:
Inventors:
Assignee:
Saes Getters S.p.A., Lainate, IT;
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/976 ; H01L 2/994 ; H01L 3/1062 ; H01L 3/1113 ; H01L 2/7108 ;
U.S. Cl.
CPC ...
H01L 2/976 ; H01L 2/994 ; H01L 3/1062 ; H01L 3/1113 ; H01L 2/7108 ;
Abstract
An integrated capacitive device has a thin-film capacitor formed of first and second electrode layers, electrically separated by a dielectric layer formed of a hydrogen-degradable compound. To protect the dielectric layer from degradation due to hydrogen diffusion, at least one layer of a getter material is provided, selected from alloys of zirconium, vanadium and iron, optionally containing minor quantities of manganese and/or a rare earth group element, and alloys of zirconium with at least one metal of the group of iron, cobalt and nickel, optionally containing up to about % by weight of elements of the rare earth group.