The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
May. 24, 2001
Applicant:
Inventor:
Fusao Shimizu, Fujisawa, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/700 ; G01B 1/124 ;
U.S. Cl.
CPC ...
H01L 2/700 ; G01B 1/124 ;
Abstract
A shape measurement device includes: a stage for loading a subject for measurement; an imaging section that forms an image of the subject for measurement; and a shifting section that implements relative shifting between the imaging section and the subject for measurement to shift the imaging section to a position corresponding to a portion on the subject for measurement which is to be measured, and the shifting section implements the relative shifting by shifting the imaging section without shifting the stage.