The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
Jan. 16, 2003
Giuseppe Curro, Messina, IT;
Antonio Scandurra, Catania, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A method of producing a protective inhibitor layer of moisture-generated corrosion for aluminum (Al) alloy metallization layers, particularly in semiconductor electronic devices, includes chemically treating the metallization layer in at least two steps using a mixture of concentrated nitric acid and trace phosphoric acid to produce a thin protective phosphate layer. Alternatively, the method may include dipping the electronic device at least once in a mixture of a polar organic solvent and phosphoric acid (H PO ) or phosphate derivatives thereof in a low percentage amount (e.g., with a phosphate reactant such as orthophosphoric acid or even R—H PO , where R is an alkaline type of ion group or an alkyl radical). The thin film may be formed on top of a thin layer of native aluminum oxide hydrate Al O .xH O.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile