The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Oct. 12, 2001
Applicant:
Inventors:
Hans Martin Hertz, Stocksund, SE;
Oscar Ĥemberg, Stockholm, SE;
Lars Rymell, Stockholm, SE;
Björn A.M. Hansson, Stockholm, SE;
Magnus Berglund, Axeltorp, SE;
Assignee:
Jettec AB, Stocksund, SE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/500 ;
U.S. Cl.
CPC ...
H01J 3/500 ;
Abstract
In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.
Hertz, Hans. (2004). Method and apparatus for generating x-ray or euv radiation (U.S. Patent No. 6760406). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6760406
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile