The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2004

Filed:

Oct. 22, 1999
Applicant:
Inventors:

Christine Anceau, Saint Roch, FR;

Fabien Pierre, Cesson Sevigne, FR;

Olivier Bonnaud, Cesson Sevigne, FR;

Assignee:

STMicroelectronics S.A., Gentilly, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ; H01L 2/18238 ;
U.S. Cl.
CPC ...
H01L 2/1336 ; H01L 2/18238 ;
Abstract

A method of forming an isolating wall in a semiconductor substrate of a first conductivity type, including the steps of boring in the substrate separate recesses according to the desired isolating wall contour; filling the recesses with a material containing a dopant of the second conductivity type; and performing an anneal step so that regions of the second conductivity type diffused from neighboring recesses join. A first series of recesses is formed from the upper surface and a second series of recesses is formed from the lower surface. The recesses have a substantially rectangular section, the large dimension of which is perpendicular to the alignment of the recesses and a depth smaller than or equal to the half-thickness of the substrate.


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