The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Sep. 13, 2002
Applicant:
Inventor:
Ken Matsumoto, Tochigi-ken, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/1461 ;
Abstract
Disclosed is a semiconductor manufacturing apparatus which includes a chamber having an environment-controlled inside space, a stage disposed in the inside space of the chamber and for holding a substrate to perform a predetermined process to the substrate, a temporary storage for temporarily storing one or more substrates in a local environment being independent from the chamber inside, a robot for conveying a substrate between the stage and the temporary storage, and a controller for controlling the robot so that the substrate is stored into the temporary storage when the environment control of the chamber inside space is suspended.