The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2004
Filed:
Jun. 07, 2002
Applicant:
Inventors:
Bharat Bhushan, Powell, OH (US);
Christopher D. Hahm, Roy, UT (US);
Assignee:
The Ohio State University, Columbus, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 2/726 ; G01R 3/102 ; G01B 7/06 ; G11B 2/000 ;
U.S. Cl.
CPC ...
G01R 2/726 ; G01R 3/102 ; G01B 7/06 ; G11B 2/000 ;
Abstract
The present invention includes capacitive film thickness measurement devices and measurement systems. The invention also includes machines or instruments using those aspects of the invention. The present invention additionally includes methods and procedures using those devices of the present invention. The present invention discloses a capacitance measurement device and technique useful in determining lubricant film thickness on substrates such as magnetic thin-film rigid disks. Using the present invention, variations in lubricant thickness on the Angstrom scale or less may be measured quickly and nondestructively.