The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2004
Filed:
Dec. 27, 2001
Isao Suzuki, Tokyo, JP;
MKS Japan, Inc., Tokyo, JP;
Abstract
The present invention provides a high-performance mass flow controller which is compact and lightweight, which has a flow path having a simple structure and which does not have dead space in which a fluid is likely to stagnate and cause the problem of contamination. A cylindrical valve conduit having a hollow structure, a yoke and a sensor conduit are connected in tandem. A fluid inlet portion is connected to an end of the valve conduit and a fluid outlet portion is connected to an end of the sensor conduit. A solenoid valve is provided on a side of the fluid inlet portion and a thermal mass flowmeter is provided on a side of the fluid outlet portion. In the valve conduit, a cylindrical plunger providing a movable portion of the solenoid valve and a valve portion of which a degree of opening is adjusted by moving the plunger are provided on a side of the fluid inlet portion. A bypass for generating a laminar flow is disposed in the sensor conduit so as to effect one-way flow of a fluid.