The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2004
Filed:
May. 01, 2003
Applicant:
Inventors:
Masao Tsukada, Atsugi, JP;
Koichi Kusuyama, Atsugi, JP;
Assignee:
Hitachi Unisia Automotive, Ltd., Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/08 ;
U.S. Cl.
CPC ...
G01L 9/08 ;
Abstract
In a pressure sensor in which a frame shaped protruding potion is formed on a surface side of a substrate by means of an etching process, and a blocking plate is connected to an upper part of the protruding portion, to form a standard pressure chamber, a recess is formed on at least one of the substrate and the blocking plate that constitute the standard pressure chamber, to increase the height of the standard pressure chamber, thereby preventing the lowering of pressure detection accuracy due to foreign substances within the standard pressure chamber.