The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
May. 20, 2002
Mitsuru Fujii, Kyoto, JP;
Minoru Sakata, Kyoto, JP;
Tomonori Seki, Kyoto, JP;
Shobu Sato, Kyoto, JP;
Omron Corporation, , JP;
Abstract
Fixed contacts ( A, A) are provided on the upper surface of a silicon substrate ( ). Signal lines ( ) electrically continuous with the fixed contacts ( A, A) are provided so as to pass through a silicon substrate ( ) from the obverse surface to the reverse surface thereof. Bumps ( ) electrically continuous with the signal lines ( ) are provided on the reverse surface of the silicon substrate ( ). A fixed electrode ( ) is provided on both sides of the fixed contacts ( A, A). Wiring conductors ( ) electrically continuous with the fixed electrode ( ) are provided so as to pass through the silicon substrate ( ) from the obverse surface to the reverse surface thereof. Bumps ( ) electrically continuous with the wiring conductors ( ) are provided on the reverse surface of the silicon substrate ( ). Through holes ( ) of the silicon substrate ( ) through which the signal lines ( ) are passed and through holes ( ) of the silicon substrate ( ) through which the wiring conductors ( ) are passed are hermetically sealed by a movable substrate ( ) or a cap ( ).