The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
May. 28, 2003
Zhiliang J. Chen, Plano, TX (US);
Kuok Y. Ling, Plano, TX (US);
Hisashi Shichijo, Plano, TX (US);
Katsuo Komatsuzaki, Ibaraki, JP;
Chin-Yu Tsai, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method for the fabrication of a light-sensing diode in a high-resistivity semiconductor substrate. A high-energy implant of ions into the substrate is patterned to form an annular well of the same conductivity type as the substrate; followed by a second high-energy implant of the opposite conductivity type, within the center of the annulus; followed by a third implant, of lower energy and high dosage, to form a region of the first conductivity type extending laterally near the substrate surface. The resulting diode junction is thereby patterned to include two planes near the substrate surface, allowing incident light to traverse the junction twice.