The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 2004

Filed:

Jul. 26, 2002
Applicant:
Inventor:

Tianwei Jing, Tempe, AZ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/28 ; G01B 7/34 ; G01N 1/316 ;
U.S. Cl.
CPC ...
G01B 5/28 ; G01B 7/34 ; G01N 1/316 ;
Abstract

A pendulum scanner that utilizes a rocking motion to scan across a sample surface is provided. The scanner is present as a component in a scanning probe microscope that includes a microscope base, an optical stage, and a sample stage. The optical stage includes a source of a collimated beam of light, at least one beam tracking element, and a first scanning element for generating movement of the optical stage in a first plane. The microscope also includes a cantilever probe having a light-reflective surface. A second scanning element is provided for generating movement of the optical stage in a second plane that is orthogonal to the first plane. A position sensitive detector is also provided and is adapted to receive a beam of light reflected from the surface of the cantilever probe and to produce a signal that is indicative of the angular movement of the reflected beam of light.


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