The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2004
Filed:
Jun. 14, 2002
Jianping Zou, Austin, TX (US);
James A. Mullins, Round Rock, TX (US);
Keith A. Edwards, Austin, TX (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A method for a run-to-run (R2R) control system includes processing materials using a process input and producing a process output, storing the process input in a database, the storing including using a timestamp, and storing at least one measurement of the process output in the database aligned with each process input using the timestamp. The method further includes iterating over the data in the database to estimate one or more coefficients for a model, and, if one or more measurements is missing, replacing the missing measurements based on a prediction from said model. The model is updated with said coefficient estimates. The method additionally includes iterating over the data from the database to estimate a process state, and, if one or more of the measurements is missing from the database, replacing the missing measurements based on prediction from the model. The model is updated with said process state estimate. A controller may receive the updated model and utilize the model to produce the next process input. The updated model may also be utilized to generate an estimate for a measurable process variable, wherein the estimate can be compared to an actual measurement to determine if the estimate is within confidence limits. If the estimate is not within confidence limits, a fault is indicated.