The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2004
Filed:
Jun. 21, 2001
Jeff E. Blackwood, Portland, OR (US);
LSI Logic Corporation, Milpitas, CA (US);
Abstract
An integrated circuit test apparatus and a method for testing an integrated circuit are described. The integrated circuit test apparatus includes a holder adapted to receive a wafer, where a frontside of the wafer is accessible to be probe tested by electrically conducting probe needles during which a backside of the wafer is accessible to be scanned by an optical scanning mechanism. The scanning mechanism can optically detect photoemission-generated defects resulting from electrical stimuli applied to the integrated circuits via the probe needles. The holder is coupled to a three-dimensional translational mechanism that will allow for automated multi-die test probing.