The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2004
Filed:
Dec. 24, 2002
Karen Reinhardt, San Jose, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A method and cluster tool for selectively removing contaminating particles from a substrate surface using a laser. An inspection tool scans the substrate surface to detect and identify any defects on the substrate surface, and then suitable software analyzes the scanned data to determine characteristics of the defect including the type of defect, the number of defects, sizes of each defect and the planar x, y coordinates of each defect. This data is used to command a laser tool to remove only those defects identified as contaminants that are capable of being removed from the surface of the substrate and may be detrimental to subsequent substrate processing techniques. The laser contacts this identified contaminant at its x, y coordinates to remove only such contaminant while not substantially treating or directly contacting the area surrounding the contaminant, thereby preventing damaging or altering the substrate surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile