The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2004
Filed:
Jan. 30, 2001
James J. Sun, New Brighton, MN (US);
Benjamin Y. H. Liu, North Oaks, MN (US);
MSP Corporation, Shoreview, MN (US);
Abstract
A deposition chamber is formed in a housing that has a substrate carrier on the interior. The substrate carrier is rotatable about a central axis, and a particle deposition head is mounted in the chamber on a support that can be moved linearly along lines that are substantially radial to the central axis of the substrate carrier. The deposition head thus can be moved to different radial positions of a substrate carried on the substrate carrier as the carrier rotates during deposition from the head to provide for a wide variety of deposition patterns on the substrate. The deposition head has a pair of aerosol discharge openings, one being the end of a substantially tubular central passageway and the other being the end of an annular passageway that surrounds the central tubular passageway.