The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Jun. 29, 2000
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A semiconductor processing process control system includes a process controller main body ( ) for controlling processes for semiconductor processing independently from semiconductor processing devices and contents of intended processing, and a control variable computation programs ( ) for obtaining control conditions for semiconductor processing adaptive to semiconductor processing devices and contents of intended processing. The control variable computation programs ( ) are used by plugging necessary one of them into the process controller main body ( ). When there is any change in semiconductor processing device and content of processing, the system can cope with such changes by merely modifying the control variable computation programs ( ). Therefore, the system flexibly, quickly copes with changes in process for processing, computing method of control variables and processing device.