The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Aug. 14, 2000
Taiji Ema, Kawasaki, JP;
Tohru Anezaki, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A semiconductor device with a self-aligned opening and a method for fabricating the same, the semiconductor device including a first conductor pattern formed over a semiconductor substrate; a first insulation film formed over the first conductor pattern; a second insulation firm formed over the first insulation film, the second insulation film having a substantially flat surface and having etching characteristics different from those of the first insulation film; a third insulation film formed over the second insulation film, the third insulation film having etching characteristics different from those of the second insulation film; a fourth insulation film formed over the third insulation film, the fourth insulation film having etching characteristics different from those of the third insulation film; an opening formed in the fourth insulation film, the third insulation film, the second insulation film, and the first insulation film, the opening being self-aligned with the first conductor pattern, a second conductor pattern formed in the opening.