The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Apr. 17, 2003
Applicant:
Inventors:
Masayuki Saito, Hiratsuka, JP;
Takeyuki Sagae, Hiratsuka, JP;
Assignee:
Tanaka Kikinzoku Kogyo K.K., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C07F 1/500 ; C23C 1/618 ;
U.S. Cl.
CPC ...
C07F 1/500 ; C23C 1/618 ;
Abstract
This invention provides raw material compounds for use in CVD which contain organic ruthenium compounds as a main ingredient, the organic ruthenium compounds having two &bgr;-diketones plus one diene, one diamine or two organic ligands which are coordinated with ruthenium. In this invention, the vapor pressures of the organic ruthenium compounds are made preferable by specifying the number of the carbon atoms contained in the above &bgr;-diketones and the types of the above diene etc.