The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 01, 2004

Filed:

Sep. 03, 2002
Applicant:
Inventors:

Bong Mo Park, Gumi, KR;

Ill Soo Choi, Gumi, KR;

Assignee:

Siltron Inc., Gumi, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/600 ;
Abstract

Disclosed are a coating material for absorbing radiant heat, forming method thereof, a radiant heat cooling apparatus using the same, and an apparatus for growing a silicon single crystal using the same. The radiant heat absorbing coating material includes 10˜15 wt/% of silica gel, 5˜10 Wt/% of graphite powder, and 75˜85 wt/% of IPA, and is formed by agitation. An ingot growing apparatus includes a quartz crucible, a heating element, a crystal pulling device, a heat shield for maintaining a constant temperature distribution in the crystal growing system, and a cooling device, wherein the quartz crucible, heating element, crystal pulling device, heat shield, and cooling device are installed inside a sealed furnace or a sealed crystal growing apparatus, wherein the silicon single crystal growing apparatus further comprises a crystal cooling means for cooling the growing crystal by absorbing radiant heat radiating from the silicon crystal, and wherein the crystal cooling means includes a circulating cooling pipe inside and an ingot radiant heat absorbing layer coated on an outer surface of the cooling means.


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