The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2004
Filed:
Apr. 22, 2002
Joachim Szczyrbowski, Goldbach, DE;
Götz Teschner, Hanau, DE;
Jürgen Bruch, Hammersbach, DE;
Unaxis Deutschland Holding GmbH, Aschheim, DE;
Abstract
A process gas source ( ) is connected to the vacuum chamber ( ), and a metering valve ( ) actuated by an automatic controller is installed between the vacuum chamber ( ) and the process gas source ( ). A potentiometric measurement electrode compares the amount of a gas in the vacuum chamber ( ) with a reference gas by way of a reference electrode or with a solid body substituting for the reference electrode and sends a signal to automatic control unit ( ), which contains a signal amplifier. The control unit then drives the generator of the power supply or the metering valve for the process gas.