The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2004
Filed:
Sep. 27, 2001
Applicant:
Inventors:
Assignee:
Seiko Instruments Inc., Chiba, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G12B 2/120 ;
U.S. Cl.
CPC ...
G12B 2/120 ;
Abstract
A scanning probe microscope comprises scanning control means for controlling raster scanning of an XYZ translator, and displacement detection means for detecting amount of displacement of the XYZ translator, and is configured so that of the two raster scanning axes, only displacement of the XYZ translator along a low frequency scanning axis is feedback controlled, displacement of the XYZ translator along a high frequency scanning axis is made larger than a region to be observed, and sampling of an amount of displacement of the XYZ translator starts at the same time as a relative position of a probe enters into the observation region.