The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 25, 2004

Filed:

Dec. 14, 2000
Applicant:
Inventors:

Kazufumi Moriya, Yokohama, JP;

Yoichi Mochida, Fujisawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 9/04 ;
U.S. Cl.
CPC ...
G01P 9/04 ;
Abstract

An angular velocity sensor includes a substrate; a first vibrator supported on the substrate by a first support beam, such as to be vibratable in a direction parallel to the substrate; a second vibrator supported by a second support beam parallel to the first vibrator, such as to be vibratable in a direction orthogonal to the vibrating direction of the first vibrator; a vibration generator for vibrating the first vibrator parallel to the substrate; an angular velocity detector for detecting the amount of displacement of the second vibrator due to an angular velocity; and a vibration-state monitor provided between the substrate and the first vibrator for monitoring the amount of displacement of the first vibrator when it is vibrated by the vibration detector.


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